Paper Title:
Defect Engineering in 2D Photonic Crystals Fabricated by Electrochemical Etching of Silicon
  Abstract

We propose electro-tunable composite structure of microcavity based on silicon 2D photonic crystal bar with a trench defect infiltrated with a liquid crystal. The device is fabricated by joint photo-electrochemical etching of deep macropores and trenches with subsequent trench opening from the substrate side. The optimized geometry and etching regime enables to minimize the lattice distortion introduced by trenches and to reduce roughness of the trench side walls. It was demonstrated that the structures with reach- through trenches and dead-end macropores are suitable for selective filling with a liquid crystal.

  Info
Periodical
Solid State Phenomena (Volumes 178-179)
Chapter
Chapter 11: Silicon-Based Photonics
Edited by
W. Jantsch and F. Schäffler
Pages
459-464
DOI
10.4028/www.scientific.net/SSP.178-179.459
Citation
E. V. Astrova, G. V. Fedulova, Y. A. Zharova, "Defect Engineering in 2D Photonic Crystals Fabricated by Electrochemical Etching of Silicon", Solid State Phenomena, Vols. 178-179, pp. 459-464, 2011
Online since
August 2011
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Price
$32.00
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