Paper Title:
Effect of Rotating Speed on Properties of Antireflective Coatings
  Abstract

Sol-gel thin films prepared by rotating coating technique, sol–gel derived bulk was prepared from constant water (H2O)/tetraethyl-orthosilicate (TEOS) ratio, rotating coating was carried out at different rotating speed 1000r/min (high speed) and 800r/min (low speed), 1500r/min (high speed) and 800r/min (low speed),2000r/min (high speed) and 800r/min (low speed),2500r/min (high speed) and 800r/min (low speed) respectively. The films were characterized by ellipsometer and SEM respectively. The experimental results show the thickness and refractive index of films are become smaller and smaller with the rotating speeds increasing.

  Info
Periodical
Solid State Phenomena (Volumes 181-182)
Chapter
V. Related Materials
Edited by
Yuan Ming Huang
Pages
443-446
DOI
10.4028/www.scientific.net/SSP.181-182.443
Citation
R. M. Jin, X. F. Guo, Z. D. Cai, L. M. Cang, Y. Tao, X. J. Han, "Effect of Rotating Speed on Properties of Antireflective Coatings", Solid State Phenomena, Vols. 181-182, pp. 443-446, 2012
Online since
November 2011
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Price
$32.00
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