Investigation of Trapped Charges-Induced Stain Formation on RF-PECVD Diamond-Like Carbon Films
| Periodical | Solid State Phenomena (Volume 185) |
|---|---|
| Main Theme | Advanced Structural and Functional Materials for Protection |
| Edited by | Ma Jan and Santhiagu Ezhilvalavan |
| Pages | 28-30 |
| DOI | 10.4028/www.scientific.net/SSP.185.28 |
| Citation | Eakkaphon Seekumbor et al., 2012, Solid State Phenomena, 185, 28 |
| Online since | February, 2012 |
| Authors | Eakkaphon Seekumbor, Papot Jaroenapibal, Nuansamorn Lertwikool, Wittawat Yamwong, Napat Triroj |
| Keywords | Capacitance-Voltage Measurements, RF-PECVD Diamond-Like Carbon, Surface Stains, Trapped Charges |
| Price | US$ 28,- |
This paper reports the investigation of a root cause of stain formation on the surfaces of diamond-like carbon (DLC) films. The DLC thin films are prepared using a radio-frequency plasma enhance chemical vapor deposition (RF-PECVD) technique with C2H4 as a carbon precursor gas. We have observed water spot-like stains on the DLC surfaces after treating the films with a dilute solution of dipropylene glycol monomethyl ether (DPGME). Low voltage-scanning electron microscopy (SEM) is employed to examine the thin layer of agglomerated stains on the surfaces. The results from capacitance-voltage (C-V) measurements show that as-deposited films inherit some trapped charge accumulations within the structure, thereby resulting in the pronounced shift in the flat-band voltage. These trapped charges make the films prone to surface stain formation. Post-annealing of the DLC films at 200 °C in N2 for 1 h has proven to reduce the trapped charge density, and therefore prevent stain formation on the DLC films.
