Paper Title:

3D Imaging and Metrology of Yttria Dispersoids in INCOLOY MA956 by Electron Tomography

Periodical Solid State Phenomena (Volume 186)
Main Theme Electron Microscopy XIV
Edited by Danuta Stróż and Krystian Prusik
Pages 37-40
DOI 10.4028/
Citation Adam Kruk et al., 2012, Solid State Phenomena, 186, 37
Online since March 2012
Authors Adam Kruk, Beata Dubiel, Aleksandra Czyrska-Filemonowicz
Keywords FIB/SEM Tomography, HAADF-STEM Tomography, INCOLOY MA956
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TEM, HAADF-STEM tomography and FIB/SEM tomography studies have been carried out to visualize three-dimensional morphology of the oxide dispersoids in ferritic ODS alloy INCOLOY MA956. Electron tomography results provided quantitative data about particle shape, size and distribution of the particles, complementary to those obtained by means of quantitative TEM metallography. It was shown that FIB/SEM, a meso-scale tomography technique, is suitable for 3D reconstruction of the objects of 100 nm in size or even smaller.