Paper Title:
Wet Clean Induce Pattern Collapse Mechanism Study

Pattern collapse phenomenon was first time observed in BEOL application with the integration of ultra low-k film scheme. With the dimension and pitch shrinkage, the pattern collapse defects are getting worse during wet clean process. In this study, the line collapse defects can be significantly reduced by adding surfactant solution to the rinse liquid. Moreover, higher aspect ratio (>4) will also deteriorate the collapse window. In addition, the kink or bowing trench profile will induce localized stress at the interface. Accordingly, optimization of both wet clean and dry etch process are the successful keys to solve line collapse issue toward future generation and beyond.

Solid State Phenomena (Volume 187)
Chapter 7: Back-End-of-Line Cleaning
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
C.C. Yang, C.C. Ko, H. O. Yang, K.F. Chen, Y.Y. Peng, J.W. Liou, C.C. Chou, H.Y. Tsai, K.C. Lin, S.M. Jeng, H.J. Tao, M. Cao, "Wet Clean Induce Pattern Collapse Mechanism Study", Solid State Phenomena, Vol. 187, pp. 253-256, Apr. 2012
Online since
April 2012
US$ 32,-
Authors: Masahiro Ishihara, Masatoshi Yamaji, Sinichi Baba, Satoshi Hanawa
Abstract:Due to excellent high temperature resistivity on the strength, carbon fiber reinforced carbon matrix composites are thought to be one of...
Authors: Terukazu Tokuoka, Toshihiko Kaji, Takao Nishioka
Abstract:We successfully developed Al -Si -Transition Metal (TM) -Rare Earth (RE) Powder Metallurgy (P/M) alloy with fine microstructure, which has...
Authors: L. Chen, G.J. Yuan, J.G. Xu, F. Guo, N. Pang
Chapter 21: Texture
Abstract:The effect of trench aspect ratio and line spacing on microstructure and texture in annealed damascene Cu interconnects has been...
Authors: Bing Cheng Liu, Xiao Ming Liang, Hong Yu Guo
Abstract:Nowadays, ring die, which is a key component in ring mouleded roll forming machine, is applied more in domestic. But it has a higher machine...
Authors: Min Shen, Yang Liu
Chapter 8: Composites, Polymers and Biomaterials
Abstract:The spruce fiber reinforced thermoplastic polypropylene (PP) composite is studied in this paper aiming at inspecting the effect of...