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Ultra Clean Processing of Semiconductor Surfaces X

Volume 187
doi: 10.4028/www.scientific.net/SSP.187
Paper Titles published in this Main Theme:
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Paper Title Page

Study on Al2O3 Film in Anhydrous HF Vapor

Authors: Heini Ritala, Mikko Tuohiniemi

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Deposition Wet-Etching Deposition (DWD) Method for Polysilicon Gate Fill-In at Flash Memory

Authors: Chun Ling Chiang, C.M. Cheng, J.H. Liao, H.J. Lin, C.C. Yeh, J.Y. Hsieh, L.W. Yang, T.H. Yang, K.C. Chen, Chih Yuan Lu

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Poly-Silicon Wet Removal for Replacement Gate Integration Scheme: Impact of Process Parameters on the Removal Rate

Authors: Farid Sebaai, Anabela Veloso, Martine Claes, Katia Devriendt, Stephan Brus, Philippe Absil, Paul W. Mertens, Stefan de Gendt

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A Hybrid Dry-Wet Approach for Removal of a Dummy Polysilicon Gate in a Replacement Metal Gate Scheme

Authors: Guang Yaw Hwang, J.H. Liao, S.F. Tzou, Mark Lin, Autumn Yeh, David Lou, Eason Chen, Weien Huang, Gowri Kamarthy, Kai Dong Xu, Amulya Athayde

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Static Charge Induced Damage during Lightly Doped Drain (LDD) by Single Wafer Cleaning Process

Authors: Ted M.L. Guo, Tsung Hsun Tsai, Chin Cheng Chien, Michael Chan, Chan Lon Yang, Jun Yuan Wu

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Surface Charging Induced Gate Oxide Degradation

Authors: Chun Ling Chiang, C.M. Cheng, J.Y. Hsieh, J.H. Liao, L.W. Yang, T.H. Yang, K.C. Chen, Chih Yuan Lu

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Investigation of Wet Clean Induced Dielectric Surface Static Charge and its Impact on Gate Oxide Integrity

Authors: Shun Wu Lin, Vincent S. Chang, Matt Yeh, Eric Houyang

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Effect of Drying Liquid on Stiction of High Aspect Ratio Structures

Authors: Gyu Hyun Kim, Sung Hyuk Cho, Ji Hye Han, Young Bang Lee, Chi Hyeong Roh, Kwon Hong, Sung Ki Park

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Elucidation of an Isopropyl Alcohol (IPA) Adsorption Phenomenon on a Wafer Surface for Achieving an Ultra-Clean and IPA-Saving Drying Process in the Batch Cleaning System

Authors: Yoshiya Hagimoto, Tomoki Tetsuka, Hayato Iwamoto, Hironobu Hyakutake, Hiroshi Tanaka

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Measurement of Adhesion Force of Resist to Wafer by Using SAICAS: Characteristics of Lift-Off of Resist by Steam-Water Mixed Spray

Authors: Takashi Mashiko, Toshiyuki Sanada, Hideo Horibe, Itsuo Nishiyama, Masao Watanabe, Atsushi Hayashida

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Showing 11 to 20 of 81 Paper Titles
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