Paper Title:
Intrinsic/Internal Gettering in Czochralski Silicon Wafers
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 19-20)
Edited by
M. Kittler and H. Richter
Pages
1-12
DOI
10.4028/www.scientific.net/SSP.19-20.1
Citation
F. Shimura, "Intrinsic/Internal Gettering in Czochralski Silicon Wafers", Solid State Phenomena, Vols. 19-20, pp. 1-12, 1991
Online since
January 1991
Authors
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Price
$32.00
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