Paper Title:
Contamination Control in Si ULSI-Technology at the 1011cm-3 - Level and below
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 19-20)
Edited by
M. Kittler and H. Richter
Pages
109-120
DOI
10.4028/www.scientific.net/SSP.19-20.109
Citation
W. Bergholz, G. Zoth, G. Götz, A. Saliov, "Contamination Control in Si ULSI-Technology at the 1011cm-3 - Level and below", Solid State Phenomena, Vols. 19-20, pp. 109-120, 1991
Online since
January 1991
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Price
$32.00
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