Paper Title:
Point Defect Engineering for ULSI Silicide Processing
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 19-20)
Edited by
M. Kittler and H. Richter
Pages
121-136
DOI
10.4028/www.scientific.net/SSP.19-20.121
Citation
G. A. Rozgonyi, J.W. Honeycutt, "Point Defect Engineering for ULSI Silicide Processing", Solid State Phenomena, Vols. 19-20, pp. 121-136, 1991
Online since
January 1991
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.