Paper Title:
Defect Control and Gettering in Cz-Silicon
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 19-20)
Edited by
M. Kittler and H. Richter
Pages
137-168
DOI
10.4028/www.scientific.net/SSP.19-20.137
Citation
F.G. Kirscht, E. R. Weber, I. Babanskaya, "Defect Control and Gettering in Cz-Silicon", Solid State Phenomena, Vols. 19-20, pp. 137-168, 1991
Online since
January 1991
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Price
$32.00
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