Paper Title:
Silicon Device Engineering by Intrinsic Point Defect Control
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 19-20)
Edited by
M. Kittler and H. Richter
Pages
169-174
DOI
10.4028/www.scientific.net/SSP.19-20.169
Citation
N.A. Sobolev, Y.V. Vyzhigin, B.N. Gresserov, E.I. Sheck, A.I. Kurbakov, E.E. Rubinova, V.A. Trunov, "Silicon Device Engineering by Intrinsic Point Defect Control", Solid State Phenomena, Vols. 19-20, pp. 169-174, 1991
Online since
January 1991
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Price
$32.00
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