Precipitation of Iron in Silicon: Gettering to Extended Surface Defects Sites |
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| Journal | Solid State Phenomena (Volumes 19 - 20) |
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| Volume | Gettering and Defect Engineering in Semiconductor Technology |
| Edited by | M. Kittler and H. Richter |
| Pages | 27-32 |
| DOI | 10.4028/www.scientific.net/SSP.19-20.27 |
| Authors | M.D. de Coteau, Peter R. Wilshaw, Robert J. Falster |
| Full Paper | 
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