Paper Title:
Gettering of Copper and Nickel in Czochralski Silicon by Oxide Particles: Assessment of Thermal Stability
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 19-20)
Edited by
M. Kittler and H. Richter
Pages
33-38
DOI
10.4028/www.scientific.net/SSP.19-20.33
Citation
R. J. Falster, Z. Laczik, G.R. Booker, P. Török, "Gettering of Copper and Nickel in Czochralski Silicon by Oxide Particles: Assessment of Thermal Stability", Solid State Phenomena, Vols. 19-20, pp. 33-38, 1991
Online since
January 1991
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Price
$32.00
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