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Defects in Multicrystalline Silicon

Journal Solid State Phenomena (Volumes 19 - 20)
Volume Gettering and Defect Engineering in Semiconductor Technology
Edited by M. Kittler and H. Richter
Pages 341-352
DOI 10.4028/www.scientific.net/SSP.19-20.341
Citation R. Schindler et al., 1991, Solid State Phenomena, 19-20, 341
Authors R. Schindler, A. Räuber
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