Paper Title:
Process Induced Defects in TiSi2-N+/P-Structures
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 19-20)
Edited by
M. Kittler and H. Richter
Pages
379-386
DOI
10.4028/www.scientific.net/SSP.19-20.379
Citation
H.B. Erzgräber, P. Zaumseil, E. Bugiel, R. Sorge, K. Tittelbach-Helmrich, F. Richter, "Process Induced Defects in TiSi2-N+/P-Structures", Solid State Phenomena, Vols. 19-20, pp. 379-386, 1991
Online since
January 1991
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Price
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