Paper Title:
Gettering of Copper and Nickel in Czochralski Silicon by Oxide Particles: Dependence on Oxide Particle Density and Cooling Rate
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 19-20)
Edited by
M. Kittler and H. Richter
Pages
39-44
DOI
10.4028/www.scientific.net/SSP.19-20.39
Citation
Z. Laczik, R. J. Falster, G.R. Booker, "Gettering of Copper and Nickel in Czochralski Silicon by Oxide Particles: Dependence on Oxide Particle Density and Cooling Rate", Solid State Phenomena, Vols. 19-20, pp. 39-44, 1991
Online since
January 1991
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Price
$32.00
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