Paper Title:
Evolution of Monoclinic SiAs Precipitates in Heavily As+ Implanted and Isothermally Annealed Silicon
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 19-20)
Edited by
M. Kittler and H. Richter
Pages
393-398
DOI
10.4028/www.scientific.net/SSP.19-20.393
Citation
A. Armigliato, A. Parisini, M. Derdour, P. Lazzari, L. Moro, D. Nobili, S. Solmi, "Evolution of Monoclinic SiAs Precipitates in Heavily As+ Implanted and Isothermally Annealed Silicon", Solid State Phenomena, Vols. 19-20, pp. 393-398, 1991
Online since
January 1991
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.