Paper Title:
Interaction of Implanted into Silicon Fluorine with Radiation Defects
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 19-20)
Edited by
M. Kittler and H. Richter
Pages
411-416
DOI
10.4028/www.scientific.net/SSP.19-20.411
Citation
L.Y. Krasnobaev, A.A. Malinin, V.V. Makarov, I.B. Sayapin, "Interaction of Implanted into Silicon Fluorine with Radiation Defects", Solid State Phenomena, Vols. 19-20, pp. 411-416, 1991
Online since
January 1991
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Price
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