Paper Title:
TEM Techniques for 2D Junction Delineation and Correlation with SIMS and SRP
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 19-20)
Edited by
M. Kittler and H. Richter
Pages
449-454
DOI
10.4028/www.scientific.net/SSP.19-20.449
Citation
A. Romano-Rodríguez, J. Vanhellemont, A. De Keersgieter, W. Vandervorst, J.R. Morante, "TEM Techniques for 2D Junction Delineation and Correlation with SIMS and SRP", Solid State Phenomena, Vols. 19-20, pp. 449-454, 1991
Online since
January 1991
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Price
$32.00
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