Paper Title:
On the Role of Stacking Faults in Copper Precipitation in Silicon
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 19-20)
Edited by
M. Kittler and H. Richter
Pages
45-50
DOI
10.4028/www.scientific.net/SSP.19-20.45
Citation
M. Seibt, "On the Role of Stacking Faults in Copper Precipitation in Silicon", Solid State Phenomena, Vols. 19-20, pp. 45-50, 1991
Online since
January 1991
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Price
$32.00
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