On the Role of Stacking Faults in Copper Precipitation in Silicon |
|
| Journal | Solid State Phenomena (Volumes 19 - 20) |
|---|---|
| Volume | Gettering and Defect Engineering in Semiconductor Technology |
| Edited by | M. Kittler and H. Richter |
| Pages | 45-50 |
| DOI | 10.4028/www.scientific.net/SSP.19-20.45 |
| Authors | Michael Seibt |
| Full Paper | 
Get the full paper by clicking here
|