Paper Title:
B-Ion Implantation into Mo-Film for Shallow Junction Formation: DLTS Analyses on the p+/n Fabricated Diodes
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 19-20)
Edited by
M. Kittler and H. Richter
Pages
505-510
DOI
10.4028/www.scientific.net/SSP.19-20.505
Citation
A. Poggi, R. Angelucci, E. Susi, M. Merli, "B-Ion Implantation into Mo-Film for Shallow Junction Formation: DLTS Analyses on the p+/n Fabricated Diodes", Solid State Phenomena, Vols. 19-20, pp. 505-510, 1991
Online since
January 1991
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Price
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