Paper Title:

TEM Studies of the Gettering of Copper, Palladium and Nickel in Czochralski Silicon by Small Oxide Particles

Periodical Solid State Phenomena (Volumes 19 - 20)
Main Theme Gettering and Defect Engineering in Semiconductor Technology
Edited by M. Kittler and H. Richter
Pages 51-56
DOI 10.4028/www.scientific.net/SSP.19-20.51
Citation A.R. Bhatti et al., 1991, Solid State Phenomena, 19-20, 51
Authors A.R. Bhatti, Robert J. Falster, G.R. Booker
Price US$ 28,-
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