Paper Title:
TEM Studies of the Gettering of Copper, Palladium and Nickel in Czochralski Silicon by Small Oxide Particles
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 19-20)
Edited by
M. Kittler and H. Richter
Pages
51-56
DOI
10.4028/www.scientific.net/SSP.19-20.51
Citation
A.R. Bhatti, R. J. Falster, G.R. Booker, "TEM Studies of the Gettering of Copper, Palladium and Nickel in Czochralski Silicon by Small Oxide Particles", Solid State Phenomena, Vols. 19-20, pp. 51-56, 1991
Online since
January 1991
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Price
$32.00
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