TEM Studies of the Gettering of Copper, Palladium and Nickel in Czochralski Silicon by Small Oxide Particles
| Periodical | Solid State Phenomena (Volumes 19 - 20) |
|---|---|
| Main Theme | Gettering and Defect Engineering in Semiconductor Technology |
| Edited by | M. Kittler and H. Richter |
| Pages | 51-56 |
| DOI | 10.4028/www.scientific.net/SSP.19-20.51 |
| Citation | A.R. Bhatti et al., 1991, Solid State Phenomena, 19-20, 51 |
| Authors | A.R. Bhatti, Robert J. Falster, G.R. Booker |
| Price | US$ 28,- |