Paper Title:
Electrical Evaluation of Silicon on Insulator Structures Formed by Oxygen Implantation by Means of Frequency Resolved Photoconductivity Measurements
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 19-20)
Edited by
M. Kittler and H. Richter
Pages
511-516
DOI
10.4028/www.scientific.net/SSP.19-20.511
Citation
F. Coromina, A. Pérez-Rodríguez, J.R. Morante, M.A. Lourenço, K.P. Homewood, P.L.F. Hemment, "Electrical Evaluation of Silicon on Insulator Structures Formed by Oxygen Implantation by Means of Frequency Resolved Photoconductivity Measurements", Solid State Phenomena, Vols. 19-20, pp. 511-516, 1991
Online since
January 1991
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