Paper Title:
An Influence of Carbon on Intrinsic Gettering Quality and Circuit Performance
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 19-20)
Edited by
M. Kittler and H. Richter
Pages
57-64
DOI
10.4028/www.scientific.net/SSP.19-20.57
Citation
L. Tesar, J. Fojtásaek, J. Kadanka, J. Bartoš, "An Influence of Carbon on Intrinsic Gettering Quality and Circuit Performance", Solid State Phenomena, Vols. 19-20, pp. 57-64, 1991
Online since
January 1991
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Price
$32.00
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