Paper Title:
Electrical Stability of Thin Nitroxide Layers on Silicon after RTO/RTN/RTO-Treatment
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 19-20)
Edited by
M. Kittler and H. Richter
Pages
599-604
DOI
10.4028/www.scientific.net/SSP.19-20.599
Citation
G. Weidner, G. Prösch, A. Beyer, M. Wolf, V. Rank, M. Kopp, "Electrical Stability of Thin Nitroxide Layers on Silicon after RTO/RTN/RTO-Treatment", Solid State Phenomena, Vols. 19-20, pp. 599-604, 1991
Online since
January 1991
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Price
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