Paper Title:
Defect Characterization of Thick SOI-Layers and Eptaxial Grown Layers on SOI Substrates
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 19-20)
Edited by
M. Kittler and H. Richter
Pages
617-624
DOI
10.4028/www.scientific.net/SSP.19-20.617
Citation
K. Höppner, B. Tillack, R. Banisch, H.H. Richter, O. Joachim, "Defect Characterization of Thick SOI-Layers and Eptaxial Grown Layers on SOI Substrates", Solid State Phenomena, Vols. 19-20, pp. 617-624, 1991
Online since
January 1991
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Price
$32.00
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