Intrinsic Gettering in Nitrogen-Doped Cz-Si |
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| Journal | Solid State Phenomena (Volumes 19 - 20) |
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| Volume | Gettering and Defect Engineering in Semiconductor Technology |
| Edited by | M. Kittler and H. Richter |
| Pages | 65-68 |
| DOI | 10.4028/www.scientific.net/SSP.19-20.65 |
| Authors | J.S. Yang, L.B. Li, Duan Lin Que |
| Full Paper | 
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