Paper Title:
Application of Doped Polysilicon Layers in a BICMOS-Technology
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 19-20)
Edited by
M. Kittler and H. Richter
Pages
69-78
DOI
10.4028/www.scientific.net/SSP.19-20.69
Citation
G. Ritter, H.B. Erzgräber, D. Bolze, "Application of Doped Polysilicon Layers in a BICMOS-Technology", Solid State Phenomena, Vols. 19-20, pp. 69-78, 1991
Online since
January 1991
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Price
$32.00
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