Low Energy Ion-Surface Interactions during Epitaxial Growth |
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| Journal | Solid State Phenomena (Volume 27) |
|---|---|
| Volume | Trends in Ion Implantation |
| Edited by | Marc van Rossum |
| Pages | 67-106 |
| DOI | 10.4028/www.scientific.net/SSP.27.67 |
| Citation | H.A. Atwater, 1992, Solid State Phenomena, 27, 67 |
| Authors | H.A. Atwater |
| Full Paper | 
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