Applications in Electronic Industry Part One - Microelectronic Industry |
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| Journal | Solid State Phenomena (Volumes 30 - 31) |
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| Volume | Materials under Irradiation |
| Edited by | A. Dunlop, F. Rullier-Albenque, C. Jaouen, C. Templier and J. Davenas |
| Pages | 379-386 |
| DOI | 10.4028/www.scientific.net/SSP.30-31.379 |
| Authors | G. Göltz, A. Grouillet |
| Full Paper | 
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