Paper Title:
Ion Implantation in Multilayers
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 30-31)
Edited by
A. Dunlop, F. Rullier-Albenque, C. Jaouen, C. Templier and J. Davenas
Pages
467-476
DOI
10.4028/www.scientific.net/SSP.30-31.467
Citation
E. Ligeon, A. Hamoudi, "Ion Implantation in Multilayers", Solid State Phenomena, Vols. 30-31, pp. 467-476, 1992
Online since
January 1992
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Price
$32.00
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