Paper Title:
Dry Cleaning of Silicon Wafers in a Low Energy Hydrogen Plasma
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 32-33)
Edited by
H.G. Grimmeiss, M. Kittler and H. Richter
Pages
111-116
DOI
10.4028/www.scientific.net/SSP.32-33.111
Citation
J. Ramm, E. Beck, A. Dommann, I. Eisele, D. Krüger, G. Lippert, "Dry Cleaning of Silicon Wafers in a Low Energy Hydrogen Plasma", Solid State Phenomena, Vols. 32-33, pp. 111-116, 1993
Online since
December 1993
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Price
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