Dry Cleaning of Silicon Wafers in a Low Energy Hydrogen Plasma |
| Journal |
Solid State Phenomena (Volumes 32 - 33) |
| Volume |
Gettering and Defect Engineering in Semiconductor Technology |
| Edited by |
H.G. Grimmeiss, M. Kittler and H. Richter |
| Pages |
111-116 |
| DOI |
10.4028/www.scientific.net/SSP.32-33.111 |
| Citation |
J. Ramm et al., 1993, Solid State Phenomena, 32-33, 111 |
| Online since |
December, 1993 |
| Authors |
J. Ramm, E. Beck, Alex Dommann, Ignaz Eisele, D. Krüger, G. Lippert |
| Full Paper |
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