Paper Title:
Process-Induced Defects in Silicon Technology
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 32-33)
Edited by
H.G. Grimmeiss, M. Kittler and H. Richter
Pages
231-246
DOI
10.4028/www.scientific.net/SSP.32-33.231
Citation
B. O. Kolbesen, M. Dellith, R. Booker, H. Cerva, F. Gelsdorf, W. Bergholz, "Process-Induced Defects in Silicon Technology", Solid State Phenomena, Vols. 32-33, pp. 231-246, 1993
Online since
December 1993
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Price
$32.00
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