Paper Title:
Non-Equilibrium Impurity Diffusion in Silicon and Silicon Carbide
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 32-33)
Edited by
H.G. Grimmeiss, M. Kittler and H. Richter
Pages
253-258
DOI
10.4028/www.scientific.net/SSP.32-33.253
Citation
N. T. Bagraev, E.I. Chaikina, L.E. Klyachkin, "Non-Equilibrium Impurity Diffusion in Silicon and Silicon Carbide", Solid State Phenomena, Vols. 32-33, pp. 253-258, 1993
Online since
December 1993
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Price
$32.00
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