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Dopant Migration Caused by Point Defect Gradients

Journal Solid State Phenomena (Volumes 32 - 33)
Volume Gettering and Defect Engineering in Semiconductor Technology
Edited by H.G. Grimmeiss, M. Kittler and H. Richter
Pages 259-268
DOI 10.4028/www.scientific.net/SSP.32-33.259
Citation P. Pichler et al., 1993, Solid State Phenomena, 32-33, 259
Online since December, 1993
Authors P. Pichler, S. List
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