Paper Title:
Investigation of Defect Generation and Precipitation in Antimony Implanted Silicon
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 32-33)
Edited by
H.G. Grimmeiss, M. Kittler and H. Richter
Pages
273-278
DOI
10.4028/www.scientific.net/SSP.32-33.273
Citation
D. Krüger, R. Kurps, P. Zaumseil, "Investigation of Defect Generation and Precipitation in Antimony Implanted Silicon", Solid State Phenomena, Vols. 32-33, pp. 273-278, 1993
Online since
December 1993
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Price
$32.00
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