Paper Title:
UHV-VLPCVD Heteroepitaxial Growth of Thin SiGe-Layers on Si-Substrates: Influence of Pressure on Kinetics and on Surface-Morphology
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 32-33)
Edited by
H.G. Grimmeiss, M. Kittler and H. Richter
Pages
361-372
DOI
10.4028/www.scientific.net/SSP.32-33.361
Citation
M. Caymax, J. Poortmans, A. Van Ammel, "UHV-VLPCVD Heteroepitaxial Growth of Thin SiGe-Layers on Si-Substrates: Influence of Pressure on Kinetics and on Surface-Morphology", Solid State Phenomena, Vols. 32-33, pp. 361-372, 1993
Online since
December 1993
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Price
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