Paper Title:
Deposition and P Doping of Si(1-x)Gex Layers in a Conventional Horizontal Tube APCVD Reactor without Load Lock System
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 32-33)
Edited by
H.G. Grimmeiss, M. Kittler and H. Richter
Pages
409-416
DOI
10.4028/www.scientific.net/SSP.32-33.409
Citation
T. Morgenstern, I. Babanskaya, G. Morgenstern, K. Schmalz, P. Gaworzewski, P. Zaumseil, D. Krüger, K. Tittelbach-Helmrich, H. Kühne, "Deposition and P Doping of Si(1-x)Gex Layers in a Conventional Horizontal Tube APCVD Reactor without Load Lock System", Solid State Phenomena, Vols. 32-33, pp. 409-416, 1993
Online since
December 1993
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