Paper Title:
Evolution of Amorphous/Crystalline Interfacial Roughness and End-of-Range Defects during Solid-Phase Epitaxial Regrowth of Ge Implaned Silicon
  Abstract

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Periodical
Solid State Phenomena (Volumes 32-33)
Edited by
H.G. Grimmeiss, M. Kittler and H. Richter
Pages
463-468
DOI
10.4028/www.scientific.net/SSP.32-33.463
Citation
M. Seibt, "Evolution of Amorphous/Crystalline Interfacial Roughness and End-of-Range Defects during Solid-Phase Epitaxial Regrowth of Ge Implaned Silicon", Solid State Phenomena, Vols. 32-33, pp. 463-468, 1993
Online since
December 1993
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Price
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