Paper Title:
Investigation of Strain in Si1-xGex/Si Heterostructures and Local Isolation Structures by Convergent Beam Electron Diffraction
  Abstract

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Periodical
Solid State Phenomena (Volumes 32-33)
Edited by
H.G. Grimmeiss, M. Kittler and H. Richter
Pages
547-552
DOI
10.4028/www.scientific.net/SSP.32-33.547
Citation
A. Armigliato, R. Balboni, S. Frabboni, J. Vanhellemont, "Investigation of Strain in Si1-xGex/Si Heterostructures and Local Isolation Structures by Convergent Beam Electron Diffraction", Solid State Phenomena, Vols. 32-33, pp. 547-552, 1993
Online since
December 1993
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