Paper Title:
Detection of Threading Dislocations by EBIC in a SiGe Epilayer with Graded Buffer
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 32-33)
Edited by
H.G. Grimmeiss, M. Kittler and H. Richter
Pages
559-564
DOI
10.4028/www.scientific.net/SSP.32-33.559
Citation
M. Kittler, C. Ulhaq-Bouillet, J. Hersener, F. Schäffler, "Detection of Threading Dislocations by EBIC in a SiGe Epilayer with Graded Buffer", Solid State Phenomena, Vols. 32-33, pp. 559-564, 1993
Online since
December 1993
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Price
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