Paper Title:
Mechanisms of Transition Metal Gettering in Silicon
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 32-33)
Edited by
H.G. Grimmeiss, M. Kittler and H. Richter
Pages
57-70
DOI
10.4028/www.scientific.net/SSP.32-33.57
Citation
D. Gilles, "Mechanisms of Transition Metal Gettering in Silicon", Solid State Phenomena, Vols. 32-33, pp. 57-70, 1993
Online since
December 1993
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Price
$32.00
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