Gettering in Silicon under Vacancy Generation Conditions |
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| Journal | Solid State Phenomena (Volumes 32 - 33) |
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| Volume | Gettering and Defect Engineering in Semiconductor Technology |
| Edited by | H.G. Grimmeiss, M. Kittler and H. Richter |
| Pages | 71-76 |
| DOI | 10.4028/www.scientific.net/SSP.32-33.71 |
| Online since | December, 1993 |
| Authors | N.T. Bagraev, L.E. Klyachkin, V.L. Sukhanov |
| Full Paper | 
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