Defect Engineering in Erbium-Doped Silicon Structure Technology |
| Journal |
Solid State Phenomena (Volumes 32 - 33) |
| Volume |
Gettering and Defect Engineering in Semiconductor Technology |
| Edited by |
H.G. Grimmeiss, M. Kittler and H. Richter |
| Pages |
83-88 |
| DOI |
10.4028/www.scientific.net/SSP.32-33.83 |
| Citation |
N.A. Sobolev et al., 1993, Solid State Phenomena, 32-33, 83 |
| Online since |
December, 1993 |
| Authors |
N.A. Sobolev, O.V. Alexandrov, B.N. Gresserov, G.M. Gusinskii, V.O. Naidenov, E.I. Sheck, V.I. Stepanov, Yu.V. Vyzhigin, L.F. Chepik, E.P. Troshina |
| Full Paper |
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