Paper Title:
Processes of Defect Formation and Gettering under Dry Etching of Si and GaAs and Measurements of Diffusion Length Profile
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 32-33)
Edited by
H.G. Grimmeiss, M. Kittler and H. Richter
Pages
99-104
DOI
10.4028/www.scientific.net/SSP.32-33.99
Citation
O.V. Kononchuk, E. B. Yakimov, "Processes of Defect Formation and Gettering under Dry Etching of Si and GaAs and Measurements of Diffusion Length Profile", Solid State Phenomena, Vols. 32-33, pp. 99-104, 1993
Online since
December 1993
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Price
$32.00
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