Paper Title:
Desorption Energy of Oxygen Adsorbed on Un-Intentionally Doped Low Pressure Chemical Vapor Deposited Silicon Films
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 37-38)
Edited by
H.P. Strunk, J.H. Werner, B. Fortin and O. Bonnaud
Pages
151-156
DOI
10.4028/www.scientific.net/SSP.37-38.151
Citation
D. Mostefa, B. Fortin, F. Raoult, M. Sarret, G. Rossé, O. Bonnaud, "Desorption Energy of Oxygen Adsorbed on Un-Intentionally Doped Low Pressure Chemical Vapor Deposited Silicon Films", Solid State Phenomena, Vols. 37-38, pp. 151-156, 1994
Online since
March 1994
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Price
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