Desorption Energy of Oxygen Adsorbed on Un-Intentionally Doped Low Pressure Chemical Vapor Deposited Silicon Films |
| Journal |
Solid State Phenomena (Volumes 37 - 38) |
| Volume |
Polycrystalline Semiconductors III |
| Edited by |
H.P. Strunk, J.H. Werner, B. Fortin and O. Bonnaud |
| Pages |
151-156 |
| DOI |
10.4028/www.scientific.net/SSP.37-38.151 |
| Citation |
D. Mostefa et al., 1994, Solid State Phenomena, 37-38, 151 |
| Authors |
D. Mostefa, B. Fortin, F. Raoult, M. Sarret, G. Rossé, O. Bonnaud |
| Keywords |
Aging, Chemisorption, Desorption, Electrical Conductivity, Ionosorption, Poly-Silicon |
| Full Paper |
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