Paper Title:
Microstructure of Poly-Si Obtained by Rapid Thermal Annealing of Amorphous Silicon Films
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 37-38)
Edited by
H.P. Strunk, J.H. Werner, B. Fortin and O. Bonnaud
Pages
287-292
DOI
10.4028/www.scientific.net/SSP.37-38.287
Citation
J. Stoemenos, N.A. Economou, L. Haji, M. Bonnel, N. Duhamel, B. Loisel, "Microstructure of Poly-Si Obtained by Rapid Thermal Annealing of Amorphous Silicon Films", Solid State Phenomena, Vols. 37-38, pp. 287-292, 1994
Online since
March 1994
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Price
$32.00
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