Paper Title:
Beam Shape Effects with Excimer Laser Crystallisation of Plasma Enhanced and Low Pressure Chemical Vapor Deposited Amorphous Silicon
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 37-38)
Edited by
H.P. Strunk, J.H. Werner, B. Fortin and O. Bonnaud
Pages
299-304
DOI
10.4028/www.scientific.net/SSP.37-38.299
Citation
S.D. Brotherton, D.J. McCulloch, M.J. Edwards, "Beam Shape Effects with Excimer Laser Crystallisation of Plasma Enhanced and Low Pressure Chemical Vapor Deposited Amorphous Silicon", Solid State Phenomena, Vols. 37-38, pp. 299-304, 1994
Online since
March 1994
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Price
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