Paper Title:
Crystalline and Electrical Properties of Polysilicon Obtained by Annealing of Si Films Produced by Low Pressure Chemical Vapor Deposition from Si2H6
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 37-38)
Edited by
H.P. Strunk, J.H. Werner, B. Fortin and O. Bonnaud
Pages
305-310
DOI
10.4028/www.scientific.net/SSP.37-38.305
Citation
E. Campo, J.P. Guillemet, J.J. Pedroviejo, B. Legros-de Mauduit, E. Scheid, "Crystalline and Electrical Properties of Polysilicon Obtained by Annealing of Si Films Produced by Low Pressure Chemical Vapor Deposition from Si2H6", Solid State Phenomena, Vols. 37-38, pp. 305-310, 1994
Online since
March 1994
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Price
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