Paper Title:
Defect Structure of Multicrystalline Chemical Vapor Deposited Silicon Films
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 37-38)
Edited by
H.P. Strunk, J.H. Werner, B. Fortin and O. Bonnaud
Pages
381-386
DOI
10.4028/www.scientific.net/SSP.37-38.381
Citation
A. Voigt, B. Rillich, H. P. Strunk, "Defect Structure of Multicrystalline Chemical Vapor Deposited Silicon Films", Solid State Phenomena, Vols. 37-38, pp. 381-386, 1994
Online since
March 1994
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Price
$32.00
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